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<br />April 23, 2001 <br />Memorandum <br />Multek - Chemical Analysis <br />Page -3- <br /> <br />Area: Inner Laver Preclean <br /> <br />Designation: F-1 <br /> <br />CHEMICAL <br /> <br />CAS NO. <br /> <br />Corrosives (Closed Use): <br /> <br />Sulfuric Acid 7664-93-9 <br />Maximum Allowed per Control Area, Closed Use <br />Classification: <br /> <br />QUANTITY <br /> <br />72.0 aals. <br />1,000.0 gals. <br />F-1 <br /> <br />Area: Inner Laver Develop/Etch/Strip (DES) <br /> <br />CHEMICAL <br /> <br />CAS NO. <br /> <br />Corrosives (Closed Use): <br /> <br />Potassium Carbonate <br />Hydrochloric Acid <br />Sodium Chlorate <br />Ethylenediamine <br />Monoethanolamine <br />. Total, Corrosives, Closed use <br />Maximum Allowed per Control Area <br />Classification: <br /> <br />584-08-7 <br />7647-01-0 <br />7775-09-9 <br />107-15-3 <br />141-43-5 <br /> <br />Other Health Hazards (Closed Use): <br /> <br />Sodium Chlorate 7775-09-9 <br />Maximum Allowed per Control Area, Closed Use <br />Classification: <br /> <br />Class 1. Oxidizers (Closed Use): <br /> <br />Sodium Chlorate 7775-09-9 <br />Maximum Allowed per Control Area, Closed Use <br />71.4 gallons @ 10 Ibs/gallon = <br />Classification: <br /> <br />Toxics (Closed Use): <br /> <br />Ethylenediamine 107 -15-3 <br />Maximum Allowed per Control Area, Closed Use <br />14.4 gallons @ 10 Ibs/gallon = <br />Classification: <br /> <br />Class I-C, Flammable liquids (Closed Use): <br /> <br />Ethylenediamine 107 -15-3 <br />Maximum Allowed per Control A~ea, Closed Use <br />Classification: <br /> <br />Designation: F-1 <br /> <br />QUANTITY <br /> <br />4.6 gals. <br />47.2 gals. <br />71.4 gals. <br />14.4 gals. <br />43.1 aals. <br />180.7 gals. <br />1,000.0 gals <br />F-1 <br /> <br />71.4 gals. <br />Not Limited <br />F-1 <br /> <br />71.4 aals. <br />8,000.0 Ibs. <br />714.0Ibs. <br />H-3 <br /> <br />14.4 aals. <br />1,000.0 Ibs. <br />144.0Ibs. <br />F-1 <br /> <br />14.4 aals. <br />180.0 gals. <br />F-1 <br />